High focusing efficiency in subdiffraction focusing metalens

Abstract Vector beams with phase modulation in a high numerical aperture system are able to break through the diffraction limit. However, the implementation of such a device requires a combination of several discrete bulky optical elements, increasing its complexity and possibility of the optical loss. Dielectric metalens, an ultrathin and planar nanostructure, has a potential to replace bulky optical elements, but its optimization with full‐wave simulations is time‐consuming. In this paper, an accurate and efficient theoretical model of planar metalens is developed. Based on this model, a twofold optimization scheme is proposed for optimizing the phase profile of metalenses so as to achieve subdiffraction focusing with high focusing efficiency. Then, a metalens that enables to simultaneously generate radially polarized beam (RPB) and modulate its phase under the incidence of x ‐polarized light with the wavelength of 532 nm is designed. Full‐wave simulations show that the designed metalens of NA = 0.95 can achieve subdiffraction focusing (FWHM = 0.429λ) with high transmission efficiency (77.6%) and focusing efficiency (17.2%). Additionally, superoscillation phenomenon is found, leading to a compromise between the subdiffraction spot and high efficiency. The proposed method may provide an accurate and efficient way to achieve sub‐wavelength imaging with the expected performances, which shows a potential application in super‐resolution imaging.