中间层
光子学
材料科学
计算机科学
光电子学
复合材料
蚀刻(微加工)
图层(电子)
作者
Lim Teck Guan,Wai Yie Leong,Ching Chuen Jong,Loh Woon Leng,David Ho Soon Wee,Batara Surya
标识
DOI:10.1109/ectc32696.2021.00050
摘要
A FOWLP and a Si-Interposer integration platform for Electronic IC (EIC) and Photonic IC (PIC) are described here. These two platforms are capable to support high-speed integration and scalable design of the next generation Optical Engine. The integration of the PIC on the FOWLP is achieved by a simple novel solution. An additional section of the Si substrate is designed at the end of the PIC to protect the optical I/Os during the FOWLP embedding process. For the Through Si-Interposer, besides providing the EIC and PIC, it include the passive alignment feature for the fibre to the PIC assembly.
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