材料科学
阈下斜率
负阻抗变换器
阈下传导
铁电性
电容
光电子学
场效应晶体管
晶体管
纳米线
锗
电气工程
电压
硅
电极
化学
物理化学
电压源
电介质
工程类
作者
Chong-Jhe Sun,Siao-Cheng Yan,Yi-Wen Lin,Meng‐Ju Tsai,Yu-Chen Tsai,Chun‐Nan Chou,Fu-Ju Hou,Guang-Li Luo,Yu‐Chung Wu
标识
DOI:10.1149/2162-8777/ac04f8
摘要
This study reports the ferroelectric (FE) layer of Hf 0.5 Zr 0.5 O 2 (HZO) film on a Ge gate-all-around field-effect-transistor (GAAFET) with inversion mode (IM) and junctionless (JL) mode, and is the first that discuss the association of the JL field-effect transistor conduction mechanism in the subthreshold region with the transient negative capacitance (TNC) effect of the FE layer are discussed. The IM Ge FE-GAAFET exhibited a minimum subthreshold slope (SS min ) of 55 mV dec −1 and a high I ON /I OFF ratio of >10 6 . The sub-60 mV dec −1 SS result demonstrates surface potential amplification, which is attributed to the TNC effect. Furthermore, the Ge JL FE-GAAFETs exhibited an SS min of 58 mV dec −1 , a high I ON /I OFF ratio (>10 5 ), and reverse drain-induced barrier lowering when compared with baseline HfO 2 devices. These IM and JL Ge FE-GAAFETs are highly suitable for low-power integrated circuit applications.
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