Atomic Layer Deposition of Metal Oxides in Perovskite Solar Cells: Present and Future

Abstract In recent years, the development of perovskite solar cells (PSCs) is advancing along the way, and the efficiency is comparable to traditional silicon‐based solar cells. However, as crucial factors in the road to commercialization, stability and upscaling manufacture have not been fully investigated yet. To solve these problems, the exploration of charge transport layer (CTL) is clearly imminent, which is critical to the stability of PSCs. Among them, inorganic metal oxides have better stability than organic CTL. Particularly, the atomic layer deposition (ALD) process can fabricate dense and scalable metal oxides based on the self‐limiting surface reaction. This perspective focuses on the recent progress of ALD‐grown metal oxides in PSCs: both of electron and hole transport layer; connection layer in tandem architectures; application in semi‐transparent perovskite solar cells (ST‐PSCs); prospective of commercialization feasibility of the ALD‐grown metal oxides in ST‐PSCs.