Performance and Reliability Simulation Analysis of MEMS Piezoelectric Cantilever Beams

With the rapid development of micro-electro-mechanical system (MEMS), reliability improvement has become one of the important issues to be solved. In this paper, the government equation is derived and the finite element model is established for the piezoelectric cantilever beam. Also, piezoelectric sensitivity is analyzed, and the relation equation between design parameter and performance is obtained. At last, the maximum stress as well as the characteristic frequency is analyzed, and some valuable design principles are obtained.