Thin Film Supercapacitors Using a Sputtered RuO[sub 2] Electrode

An all solid-state thin film supercapacitor (TFSC) was fabricated with an amorphous ruthenium oxide thin film electrode and an amorphous (Lipon) thin film electrolyte. The electrochemical behavior of the was characterized by a charge-discharge technique in the potential range of 0-2 V. The exhibited a behavior of a bulk-type supercapacitor, even though the capacity of an as-fabricated TFSC was found to be much lower than the bulk one and showed a rapid decrease in capacity. This can be explained by excess oxygen ions and interfacial structure modification. The discharge yield dropped by 53% after 500 cycles. The capacitance per volume of the at the first cycle is 38 mF/cm2 μm. © 2001 The Electrochemical Society. All rights reserved.