128×128 three-dimensional MEMS optical switch module with simultaneous optical path connection for optical cross-connect systems

A 128×128 three-dimensional MEMS optical switch module and a switching-control algorithm for high-speed connection and optical power stabilization are described. A prototype switch module enables the simultaneous switching of all optical paths. The insertion loss is less than 4.6 dB and is 2.3 dB on average. The switching time is less than 38 ms and is 8 ms on average. We confirmed that the maximum optical power can be obtained and optical power stabilization control is possible. The results confirm that the module is suitable for practical use in optical cross-connect systems.