Nitrogen adsorption induced surface kinetics changes of diamond growth by microwave plasma CVD

The strong temperature dependence of the contribution of nitrogen to diamond growth enhancement by microwave plasma chemical vapor deposition (MPCVD) have been firstly reported and systematically studied. Generally, an enhanced hydrogen desorption from the growing surface induced by the incorporated nitrogen atoms in diamond sublayer has been successfully used to explain the weak temperature depended growth enhancement of diamond by nitrogen addition, but cannot be employed to explain the observed strong temperature dependence of nitrogen contribution to diamond growth enhancement observed in this work. This indicates a significant change of surface kinetics of diamond growth induced by nitrogen addition should be occurred around 700 °C where a maximum value achieved. At this relative low temperature, the growing surface sites should be almost fully covered with hydrogen atoms with relative low nitrogen incorporated in the diamond. The adsorbed nitrogen may then make a contribution to promote hydrogen desorption, which is believed to play a dominant role in affecting the contribution of nitrogen. Experimental and calculation results do show that both the nitrogen adsorbed on the growing surface and incorporated in the sublayer may have different contribution to the growth rate enhancement, resulting in strong and weak temperature dependence, respectively.