材料科学
光电子学
金属有机气相外延
发光二极管
量子效率
二极管
电流密度
半最大全宽
量子阱
Crystal(编程语言)
宽禁带半导体
图层(电子)
光学
激光器
外延
纳米技术
物理
程序设计语言
量子力学
计算机科学
作者
Guangying Wang,Y. Li,Cheng Liu,Qiqi Lin,Surjava Sanyal,Chirag Gupta,Shubhra S. Pasayat
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:2023-11-27
卷期号:41 (6)
摘要
In this work, we present an InGaN/GaN/AlGaN active region design for high-efficiency UV LED grown by MOCVD. The use of the GaN layer allows the AlGaN layer to be grown in optimized conditions which will enhance the overall crystal quality and device performance. The InGaN/GaN/AlGaN structure showed an improvement in the internal quantum efficiency (IQE) simulation in comparison with the conventional InGaN/AlGaN structure, with 15% and 14% at operating current density of 20 and 30 A/cm2, respectively. The IQE advantage remains at more than 10% in the operating current density range from 0 to 100 A/cm2 due to an enhanced electron-hole wavefunction overlap. The InGaN/GaN/AlGaN quantum wells were utilized to grow UV-A structures and micro-LEDs with sizes ranging from 20 × 20 to 100 × 100 μm2 were fabricated. The fabricated micro-LEDs showed a reliable emission at around 372 nm with 9 nm FWHM. Micro-LED devices with smaller sizes showed an improvement in relative external quantum efficiency due to its advantage in current spreading. This manuscript presents the potential to achieve both improved crystal quality and high-efficiency device using InGaN/GaN/AlGaN active region design.
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