Low-loss optofluidic waveguides in fused silica enabled by spatially shaped femtosecond laser assisted etching combined with carbon dioxide laser irradiation

• Low-loss optofluidic waveguides encapsulated in glass has been demonstrated using hybrid laser microfabrication. • Smooth and uniform all-glass microchannels with diameters down to ∼ 9 μm and centimeter-scale lengths are fabricated. • Internal polishing of the whole microchannels and port sealing are simultaneous achieved by a laser-induced thermal flow effect. We demonstrate the fabrication of low-loss optofluidic waveguides encapsulated in fused silica glass using femtosecond laser microfabrication followed by carbon dioxide laser irradiation. Spatially-shaped femtosecond laser-assisted chemical etching is first used to fabricate microchannels with circular cross-sections and a string of open extra-access ports in the glass. Further, the carbon dioxide laser direct writing on the glass surface is used to create a thermal reflow effect of etched glass microstructures for simultaneously polishing all internal surfaces of channels and sealing the extra-access ports. With this effect, the inner surface roughness of the etched microchannels can be reduced to ∼ 40 nm. Finally, a single-mode microfluidic optical waveguide with a propagation loss of ∼ 0.78 dB/cm at 1310 nm is obtained inside the glass by filling a mixture solution of decane and liquid paraffin into a laser-polished microchannel.