Enhanced Deep Ultraviolet Photoresponse in Ga doped ZnMgO Thin Film

材料科学 掺杂剂 响应度 紫外线 兴奋剂 光电流 光电子学 分析化学(期刊) 暗电流 X射线光电子能谱 溅射沉积 薄膜 溅射 光电探测器 纳米技术 化学 核磁共振 物理 色谱法
作者
Mao Ye,Dongbo Wang,Shujie Jiao,Lang Chen
出处
期刊:Micromachines [Multidisciplinary Digital Publishing Institute]
卷期号:13 (7): 1140-1140 被引量:3
标识
DOI:10.3390/mi13071140
摘要

High Mg content (60%) ZnMgO samples with and without Ga dope were grown by an RF magnetron sputtering system. The effect of Ga dope on the ZnMgO sample and the respective ultraviolet photodetectors (UVPD) device's performance were carefully studied by various experimental methods. The investigations of the structure and optical properties of the ZnMgO sample established that the Ga doped sample has a better crystal quality and larger band gap (5.54 eV). The current-voltage characteristics indicate that both the photocurrent and dark current were enhanced after Ga dope. Under 12 V bias, the undoped UVPD show two spectral response peaks at 244 nm and 271 nm with a responsivity of 1.9 A/W and 0.38 A/W, respectively. While the Ga doped UVPD showed only one response peak at 241 nm and the deep UV responsibility up to 8.9 A/W;, as the bias increased from 12 V to 60 V, the responsiveness raised to 52 A/W, with a signal to noise ratio (241 nm/700 nm) as high as 105. Combining the results of XRD, PL spectrum and XPS, the enhanced ultraviolet photoresponse of the Ga dope device contributed to improving the crystal quality and "dopant-defect pairing effect" caused by Ga doping, which led to a considerable reduction in the number of ionized impurities in the scatting centers, and enhanced the carrier's mobility. Our work demonstrates that even a high Mg content ZnMgO can exhibit enhanced UV performance after a Ga dope due to the dopant-defect pairing effect, which confirmed the advantage of the use of ZnMgO in the deep-UV region.
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