算法
材料科学
分析化学(期刊)
光学
计算机科学
物理
化学
色谱法
作者
Hiroyuki Ishigaki,Ikuo Futamura,Takuhisa Okada,Takahiro Mamiya,Yoshio Hayasaki
出处
期刊:Applied Optics
[The Optical Society]
日期:2021-01-27
卷期号:60 (10): B8-B8
被引量:5
摘要
Digital holography (DH) with two wavelengths (TW) that are close to each other was applied to height measurement of solder bumps having spherical specular surfaces with diameters of ∼ 20 µ m and heights of ∼ 20 µ m . We employed the parallel phase shifting method for instantaneous image capturing, and we improved the spatial resolution of our TW-DH system having two beams with different wavelengths that traveled in opposite directions in the interferometer. It gave 74-times higher repetition and 2.4-times higher spatial resolution than those in our previous DH system based on the Fourier transform method.
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