Simulation, fabrication and testing of bulk micromachined 6H-SiC high-g piezoresistive accelerometers

Abstract We report the utilization of key design parameters to simulate, batch-fabricate and evaluate first-generation single crystal 6H-SiC piezoresistive accelerometers for extreme impact applications. High- g simulation results predicted safe operation above 100,000× g and preliminary experimental tests were successfully performed to 40,000× g . Sensitivities ranging between 50 and 343 nV/g were measured for differing accelerometer sensing elements. Non-linear behavior was observed over the shock range relative to the commercial benchmark accelerometer. These initial results offer promise for the use of 6H-SiC accelerometers in extreme impact sensing.