Graphene synthesis by PECVD

PECVD method is attractive for SWCNTsyntheis due to the better control and it is providing appropriate environment for decomposition of carbon feed-stocks at a lower temperature (<;800) [1]. To produce graphene sheets on a copper surface the rf plasma source was built by using a quartz tube. The quartz tube was surrounded by a furnace for temperature control. As a carbon feed-stock an ethanol vapor was injected into the argon and hydrogen environment. The plasma environment will be analyzed by optical emission method and the effect of plasma power and the synthesis temperature on the graphene sheets will be analyzed by SEM, AFM and Raman spectra.