电介质
化学气相沉积
原子层沉积
数码产品
物理气相沉积
范德瓦尔斯力
热稳定性
带隙
光电子学
蒸发
沉积(地质)
材料科学
纳米技术
物理
图层(电子)
薄膜
化学
分子
有机化学
热力学
生物
古生物学
物理化学
沉积物
作者
Jing Yu,Wei Han,Ruey Jinq Ong,Jingwen Shi,Abdulsalam Aji Suleiman,Kailang Liu,C. C. Ling
摘要
As a two-dimensional (2D) inorganic molecular van der Waals crystal, Sb2O3 has been widely recognized as an excellent dielectric and encapsulation material due to its wide bandgap, high dielectric constant (κ), and remarkably high air stability. Considering the significance and potential application of Sb2O3 in future electronic devices, it is valuable to summarize its recent advancements. In this review, we present the latest progress on 2D Sb2O3 flakes and films, encompassing synthesis methods, physical properties, and device applications. First, preparation strategies such as chemical vapor deposition, vertical physical vapor deposition, thermal evaporation deposition, liquid metal synthesis, and atomic layer deposition growth routes are highlighted. Subsequently, the mechanical properties and the phase transition mechanisms of 2D Sb2O3 are presented. Moreover, device applications, including encapsulation layer, photodetector, and gate dielectric, are demonstrated. Finally, we outline the future challenges and research priorities of 2D Sb2O3 materials.
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