平版印刷术
计算机科学
光刻
简单(哲学)
光电子学
材料科学
认识论
哲学
标识
DOI:10.1364/iodc.2010.ituc1
摘要
Illumination systems in microlithography have evolved from simple light mixing devices towards ultra-flexible contrast enhancement tools, enabling today’s most advanced lithographic processes. A survey of the changing illumination requirements, design concepts and functionality is given.
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