Plasma Resistance Evaluation and Characteristics of Yttria Ceramics Sintered by Using Calcination Yttria

The evaluation of plasma resistance and the characteristics of yttria ceramics fabricated by calcination yttria as a starting material without dopants under an oxidation atmosphere was investigated.Regardless of the starting materials, as-received, and calcined yttria powder, XRD patterns showed that all samples have Y 2 O 3 phase.The three cycling process inhibited a large grain, which occurs frequently during the yttria sintering, and a high density ceramic with a homogeneous grain size was obtained.The grain size of the sintered ceramic was affected by the starting powders.The smaller the grain size, the larger were the Young's modulus and K IC .Compared to Al 2 O 3 and ZrO 2 ceramics, yttria ceramics showed a 3 times larger plasma resistance and a 1.4 ~ 2.2 times lower weight loss during the plasma etching test, respectively.