High Sensitivity Multiple Microcavity Enhanced 3-D Printed Micro-Stud Array Ultrafast Response Detector at 6G Frequency

The next generation of communication 6G technology in the terahertz band is crucial for the development of the future high-speed information society. How to achieve a highly sensitive response to low power density terahertz signals at room temperature has been one of the frontier research hot issues within this field. In addition, the reproducible line height of the device and its availability for mass production are also urgent issues to be addressed. Here, we have proposed a 6G detector based on combining the advantages of subwavelength microstructures, 3-D microcavity, and Weyl-semimetallic films. The localized surface plasmon (LSP) effect by the micro-stud array is used for the enhancement of the light–matter interaction. Also, the 3-D structure leads to a microcavity allowing for a near enhancement of the interaction on a small scale. Furthermore, the 0-band gap of the Weyl semimetal and the enhanced response to low-energy photon displacement currents near make the Weyl semimetal more suitable for detecting terahertz waves. In addition, the use of projection microstereolithography ( $\text{P}\mu $ SL) 3-D print technology combined with magnetron sputtering of thin films makes this terahertz detection technology solution reproducible, low cost, simple processing, and promising for industrial production, contributing to the development and diffusion of 6G technology.