Broad review of four-point probe correction factors: Enhanced analytical model using advanced numerical and experimental cross-examination

Following a comprehensive top-to-bottom review of the four-point probe’s (4PP) system configurations and usages, an original, cross-checking approach of combining analytical, experimental and numerical methods is presented to serve as a simple unified package for determining electrical resistivity. After a successful comparison based on error analysis between the different results, a robust correction of the analytical model is presented to extract the electrical resistivity from simulations results. Moreover, we present original results from a selection of models and measurements of resistivity applied to germanium samples sharing non-ideal geometries.