The concept of homogeneity of materials and the aim for the evaluation of homogeneity were introduced. It was discussed in detail for the application of one-way ANOVA into the evaluation of homogeneity of materials and the role which a statistical quantity plays in the different range. It can be illustrated that a small F value is necessarily not considered as a criterion of qualified homogeneity. It was also pointed out that the inhomogeneity with sample may cause a small F value. Based on the theoretical explanation, an equation was given for the threshold value of small F. A calculation of the threshold value of small F occurring in the common experiments was made using the routines of numerical integration. An investigation into the origin of small F value was carried out. Moreover, the regional inhomogeneity and its criteria were also shown.