Sn O 2 target with controllable microstructure and thickness for generating extreme ultraviolet light

The target of weaved tin-oxide nanofibers were fabricated by electrospinning method. The microstructure, density, and thickness of the tin-oxide fibers could be well controlled by different fabrication condition. Extreme ultraviolet emission from Sn and SnO2 nanofibers was experimentally investigated. It was found that the microscopic structure of the target could have great affection on the extreme ultraviolet light emission.