Study on Start Burning Performance of Micro-ICP Using Stereo Spiral Coil

According to the problem of low energy utilization of plane spiral coil used in micro-ICP, a kind of micro stereo helical coil was designed. Made 24 different structural parameters of stereo spiral coil whose diameter range 3~10 mm. Using comprehensive experimental method tested different parameters’ coils inspire argon plasma. In 13.56MHz RF power, relationships between argon pressure, coil turns, coil diameter and combustion /maintaining power of micro-ICP excitation source were tested. From spectrometer observed 17 argon emission spectrum in 690~860 nm. Spectral lines intensity influenced by RF power and work pressure. Experiments proved that micro-ICP excitation source using stereo helical coil is feasible. It can form Ar plasma and inspire Ar spectral lines.