Effects of humidity on sterilization ofGeobacillus stearothermophilusspores with plasma-excited neutral gas

We investigate the effects of relative humidity on the sterilization process using a plasma-excited neutral gas that uniformly sterilizes both the space and inner wall of the reactor chamber at atmospheric pressure. Only reactive neutral species such as plasma-excited gas molecules and radicals were separated from the plasma and sent to the reactor chamber for chemical sterilization. The plasma source gas is nitrogen mixed with 0.1% oxygen, and the relative humidity in the source gas is controlled by changing the mixing ratio of water vapor. The relative humidity near the sample in the reactor chamber is controlled by changing the sample temperature. As a result, the relative humidity near the sample should be kept in the range from 60 to 90% for the sterilization of Geobacillus stearothermophilus spores. When the relative humidity in the source gas increases from 30 to 90%, the sterilization effect is enhanced by the same degree.