Design and Preparation of Nanoporous Cu/Ag Multilayer Films

Cu30Al70 and Ag30Al70 multilayer precursor films were prepared by magnetron sputtering, respectively. Then the nanoporous Cu/Ag multilayer composite films were successfully prepared by selecting the appropriate H2SO4 solution as the dealloying solution. It was found that the nanoporous structure was stable in the dealloying solution. The morphology and structure of nanoporous multilayer films are mainly related to the phase composition of precursors. The structure of nanoporous multilayers can be simply regarded as the superposition of single-layer structures. Our work shows that nanoporous multilayers can be well-prepared by magnetron sputtering combined with dealloying.