符号
无定形固体
铁电性
极化(电化学)
材料科学
物理
分析化学(期刊)
结晶学
数学
电介质
光电子学
化学
算术
有机化学
物理化学
作者
Zefu Zhao,Yu-Rui Chen,Yun-Wen Chen,Jer-Fu Wang,Yifan Xing,Ji Wang,Guan-Hua Chen,Jia-Yang Lee,Rachit Dobhal,Liu C
标识
DOI:10.1109/ted.2023.3308924
摘要
Metal–ferroelectric (FE)–metal structures with amorphous WO $_{\textit{x}}$ bottom electrodes (BEs) are experimentally and theoretically demonstrated to favor the FE orthorhombic phase formation. The ferroelectric tunnel junction (FTJ) using the amorphous WO $_{\textit{x}}$ BE and ZrO $_{\text{2}}$ -HfO $_{\text{2}}$ superlattice FE layer has a remanent polarization of 70 $\mu $ C/cm $^{\text{2}}$ . The FTJ has high endurance of 1E12 and 1E8 cycles for the write operation with incomplete and complete polarization switching, respectively. The write and read voltages have record low values of 1.3 and $-$ 0.15 V, respectively. The $-$ 0.15-V read does not cause read disturbance due to no polarization switching. The thermal budget is as low as 450 $^{\circ}$ C.
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