Monolithic high-performance micro-LEDs using planar-geometry pixelation process for high-resolution micro-display applications

Herein, a monolithic micro-pixelated light-emitting diode (μLED) display realized using ion-surface-treatment-based planar-geometry pixelation is reported. A high-resolution blue-emitting μLED array is fabricated by optimizing ion species of a near-surface selectively positioned isolation process. The μLED array exhibiting inhibited surface recombination and higher output power is achieved by using heavy ions, such as fluorine (F−), due to more stable opto-electrical isolation and better process reliability. Furthermore, the low forward voltage of F−-IST-based μLED pixels can effectively improve the wall-plug efficiency for the μLED array with a pixel diameter of 6 μm. Conversely, the poor thermal stability of light hydrogen (H+) ions limits its device applications. Analysis based on a rate equation model reveals that the luminescence mechanism of F−-IST-based μLEDs is dominated by radiative recombination, which will benefit the planar-geometry pixelation for realizing highly efficient full-color microdisplays.