可靠性(半导体)
光刻
晶体管
材料科学
平版印刷术
制作
纳米技术
电子工程
计算机科学
光电子学
电气工程
工程类
电压
物理
医学
功率(物理)
替代医学
量子力学
病理
作者
Carlos Márquez,Elsa Fuente-Zapico,Paula Martínez-Mazón,Jose C. Galdon,Luca Donetti,Carlos Navarro,F. Gámiz
标识
DOI:10.1016/j.sse.2023.108712
摘要
This research investigates the use of 2D materials (specifically graphene) as active channel in liquid-gate
\ntransistors used as detectors of biological targets on functionalized surfaces. However, before these sensors
\ncan be effectively used, it is crucial to establish a reliable sensing platform within two-dimensional materials
\nas active channels, and to evaluate the fabrication, lithography, and reliability of these devices. In this study,
\nwe analyzed the inter-device variability and reliability of the transistors, as well as the potential factors that
\nmay exacerbate these issues under operative conditions. We performed structural characterization to confirm
\nthe quality of the materials, followed by photolithography and processing to create liquid-gate sensors. We then
\nconducted electrical evaluations of the devices, which revealed significant reliability issues and inter-device
\nvariability. To address these problems, we propose the use of an intergate-coupling effect that utilizes both
\nfront- and back-gates simultaneously. Our findings have important implications for the design and optimization
\nof 2D materials-based liquid-gate sensors for biological applications.
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