选择性
蚀刻(微加工)
氮化硅
硅
化学
四极杆质量分析仪
分析化学(期刊)
离子
制作
反应离子刻蚀
氮化物
电子顺磁共振
二氧化硅
激进的
无机化学
材料科学
有机化学
冶金
图层(电子)
催化作用
替代医学
核磁共振
病理
物理
医学
作者
Shih‐Nan Hsiao,Kenji Ishikawa,Toshio Hayashi,Jiwei Ni,Takayoshi Tsutsumi,Makoto Sekine,Masaru Hori
标识
DOI:10.1016/j.apsusc.2020.148439
摘要
Gas chemistry has a significant impact on etch selectivity in semiconductor device fabrication, which is important for realization of atomic-scale removal and formation of high-aspect ratio features. To widen the controllable changes in the etchant composition in etching processes, our previous calculation showed the possibility of the controllable generation of CH2F and CHF2 related ions and radicals from a 1,1,2-trifluoroethane (CH2FCHF2) parent gas. The etch selectivity among silicon nitride (SiN), silicon dioxide (SiO2) and poly-Si films using CH2FCHF2 plasma mixed with O2 and Ar was investigated. The effects of the CH2FCHF2 and O2 partial pressures on the composition of CHF2+ and CH2F+ ions, which were measured with a quadrupole mass spectrometer, and on the possible reactions with respect to the CH2FCHF2 and O2 mixed gas phase were investigated using quantum chemical calculations. The etch selectivity was investigated through surface etching reactions for SiN, SiO2, and poly-Si films.
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