盖革计数器
雪崩光电二极管
电子线路
CMOS芯片
光电子学
光电二极管
光子计数
单光子雪崩二极管
硅光电倍增管
激光雷达
物理
电气工程
光子
光学
计算机科学
探测器
工程类
闪烁体
作者
Brian F. Aull,E.K. Duerr,Jonathan Frechette,K. A. McIntosh,D. R. Schuette,R.D. Younger
标识
DOI:10.1109/jstqe.2017.2736440
摘要
Over the past 20 years, we have developed arrays of custom-fabricated silicon and InP Geiger-mode avalanche photodiode arrays, CMOS readout circuits to digitally count or time stamp single-photon detection events, and techniques to integrate these two components to make back-illuminated solid-state image sensors for lidar, optical communications, and passive imaging. Starting with 4 × 4 arrays, we have recently demonstrated 256 × 256 arrays, and are working to scale to megapixel-class imagers. In this paper, we review this progress and discuss key technical challenges to scaling to large format.
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