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Multi-Electrode Coplanar Capacitive Probe With Various Arrangements for Non-Destructive Testing of Materials

电容感应 电极 电场 材料科学 有限元法 电容 声学 灵敏度(控制系统) 渗透(战争) 穿透深度 光电子学 电气工程 电子工程 工程类 光学 物理 结构工程 量子力学 运筹学
作者
Farima Abdollahi-Mamoudan,Sebastien Savard,Clemente Ibarra-Castanedo,Tobin Filleter,Xavier Maldague
出处
期刊:IEEE Sensors Journal [IEEE Sensors Council]
卷期号:22 (8): 8134-8146 被引量:1
标识
DOI:10.1109/jsen.2022.3155974
摘要

The coplanar capacitive sensing method is considered a relatively novel electromagnetic technique in NDT. The size of the electrodes and the separation distance between them significantly affect the penetration depth, electric field strength, and sensitivity of the measurement. To achieve different penetration depths and electric field strengths, separate sensors with various sizes $/$ separations can be employed which is time-consuming. In order to reduce the costs and time, a multi-electrode sensor is designed and introduced in this paper. This type of sensor uses coplanar electrodes to generate the multiple fringing electric field to inspect the specimen. In this sensor, it is possible to have multiple driving and sensing electrodes at the same time, which provides a variety of different sizes and separation distances leading to various depths of penetration and electric field strengths. In the framework of this paper, the principle of the multi-electrode coplanar capacitive probe was explained. A 3D Finite Element Modelling (FEM) was employed to simulate and illustrate the electric field distribution from a multi-electrode coplanar capacitive sensor with different arrangements of driving and sensing electrodes, and how this field may be altered by changing the arrangement. The multi-electrode probe was manufactured and several sets of experiments were conducted under various conditions. The Measurement Sensitivity Distribution (MSD) was applied to characterise and interpret the variable output from the physical scan of the specimen. The case study on an acrylic sample comprised of defects with different depths demonstrated the feasibility of defect discrimination using a multi-electrode capacitive sensor.

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