Thermal outgassing behavior and photoemission studies of Haynes Alloy 214
作者
Pramod K. Sharma,Gregory S. Hickey
出处
期刊:Journal of vacuum science & technology [American Institute of Physics] 日期:1994-05-01卷期号:12 (3): 867-872被引量:2
标识
DOI:10.1116/1.579268
摘要
Processing of many materials at high temperatures requires a high purity environment. The outgassing from hot surfaces of the processing chamber or the heating elements is a potential problem. The total amount of outgassing as well as the time- and temperature- dependent outgassing rates are important. The outgassing from Haynes Alloy 214 has been studied experimentally under a vacuum in the temperature range from room temperature to 600 °C. In addition to the outgassing rates, the composition of the outgassed species was determined through mass spectrometric analysis. Alloy surface composition was determined by x-ray photoelectron spectroscopy. Changes in surface composition before and after heating can be accounted for by the outgassed species.