中间层
热分析
三维集成电路
材料科学
热的
集成电路封装
计算机科学
光电子学
电子工程
集成电路
工程类
复合材料
物理
蚀刻(微加工)
气象学
图层(电子)
作者
Sheng-Tsai Wu,Heng-Chieh Chien,John H. Lau,Ming Li,Julia R. K. Cline,Mandy Ji
出处
期刊:Electronic Components and Technology Conference
日期:2013-05-28
被引量:14
标识
DOI:10.1109/ectc.2013.6575766
摘要
In this investigation, the thermal and mechanical design and analysis of a TSV (through-silicon via) interposer which supports 2 active chips on its top-side and 1 active chip on its bottom-side (a real 3D IC integration with an interposer) are studied. Emphasis is placed on the thermal design and analysis of the chips' average temperatures and the applied cooling capability on the heat spreader/sink. To simplify the simulations, an equivalent model, that can preciously determine the thermal performances of TSVs and solder bumps/balls, is introduced instead of a complicate detail 3D model. Another emphasis is placed on the determination of the creep strain energy density per cycle of the solder bumps/balls between the chips and the TSV interposer, the TSV interposer and the organic package substrate, and the package substrate and the PCB (printed circuit board) under environmental thermal cycling condition.
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