卷积神经网络
计算机科学
薄脆饼
卷积(计算机科学)
可扩展性
半导体器件制造
半导体器件建模
人工智能
集合(抽象数据类型)
集成电路
半导体
电子工程
人工神经网络
模式识别(心理学)
计算机工程
CMOS芯片
工程类
电气工程
数据库
操作系统
程序设计语言
作者
Chanki Pandey,Kalpana G Bhat
标识
DOI:10.1109/globconet56651.2023.10150199
摘要
Wafer maps used to display defect patterns in the integrated circuits industry include crucial information that quality engineers may utilize to identify the cause of a defect and increase yield. In this paper, we put forth a framework for accurately and quickly categorizing semiconductor wafer faults utilizing particularly CNN-based models. This paper seeks to provide a scalable, adaptive, and user-friendly implementation of convolutional neural networks for applications classifying semiconductor defects. In categorizing the defects found on semiconductor wafers, the suggested CNN model obtained an accuracy of 90.50% & 92.28% and losses of 0.39 & 0.29 while performing the training and validation, respectively, along with the misclassification rate of 0.0772. The suggested model also learns rapidly on the validation set at a rate of 1e-03 per second. The proposed custom CNN model architecture incorporates only two convolution layers, resulting in a greatly reduced number of parameter weights and biases. Specifically, the number of parameters is only 44000, which makes the model more compact, cost-effective, and robust against random noise. Moreover, this model can function well under low power and processing limits.
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