Vertical Drive Micro Actuator Using SMA Thin Film For A Smart Button

This paper presents the performance of a shape memory alloy (SMA) thin film micro-actuator for a small tactile display to reproduce an object texture to a fingertip. Maximum displacement of 30 μm under 4.2 mN load with an actuator length of 1 mm, which fulfills the minimum requirements for reproducing a texture to a fingertip, is realized by the newly proposed SMA thin film actuator structure.