Infrared nano-sensor based on doubly splited optomechanical cavity

Optomechanical crystal (OMC) cavities are simultaneous have photonic and phononic bandgaps. The strong interaction between high co-localized optical mode and mechanical mode are excellent candidates for precision measurements due to their simplicity, sensitivity and all optical operation. Here, we investigate OMC nanobeam cavities in silicon operating at the near-infrared wavelengths to achieve high optomechanical coupling rate and ultra-small motion mass. Numerical simulation results show that the optical Q-factor reached to 1.2×10⁵ , which possesses an optical mode resonating at the wavelength of 1181 nm and the extremely localized mechanical mode vibrating at 9.2GHz. Moreover, a novel type of doubly splited nanocavity tailored to sensitively measure torques and mass. In the nanomechanical resonator central hollow area suspended low-mass elements (<100fg) are sensitive to environmental stimulate. By changing the split width, an ultra-small effective motion mass of only 4fg with a mechanical frequency as high as 11.9GHz can be achieved, while the coupling rate up to 1.58MHz. Potential applications on these devices include sensing mass, acceleration, displacement, and magnetic probing the quantum properties of nanoscale systems.