微透镜
蓝宝石
材料科学
光学
飞秒
全息术
蚀刻(微加工)
激光器
制作
光电子学
干法蚀刻
镜头(地质)
纳米技术
物理
病理
医学
替代医学
图层(电子)
作者
Xiaoyuan Cao,Yongju Lu,Hua Fan,Hong Xia,Lei Zhang,Yong‐Lai Zhang
出处
期刊:Applied Optics
[The Optical Society]
日期:2018-11-08
卷期号:57 (32): 9604-9604
被引量:27
摘要
We report rapid and mask-free fabrication of a sapphire concave microlens array by a combined method of femtosecond laser holographic processing and wet etching. The method features high fabrication efficiency, as crater arrays can be created on sapphire through a parallel processing manner, and the subsequent wet etching facilitates the formation of microlens arrays with a smooth surface. More importantly, the size and spacing of the concave microlenses can be well tuned by varying the distance of craters and etching time. Two types of microlens arrays with a spacing of 25 and 40 μm have been successfully fabricated, both of which showed good imaging performance. This method holds great promise for developing sapphire-based micro-optical components.
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