OPC model building for EUV lithography

After an initial introduction into logic fabrication, EUV lithography is finally moving into memory fabrication, and now memory companies must untangle the complex physics required to create an aerial image with this next generation technology. The optical proximity correction (OPC) model must understand and compensate for new EUV phenomena, such as non-telecentric illumination induced shadowing, across-slit variation, optical flare, and reticle black border effects. This paper compares the EUV OPC Modeling flow with the DUV modeling flow and discusses the new challenges EUV presents to OPC Model building for high-volume manufacturing.