Observing the microstructure of a (001) κ-Ga2O3 thin film grown on a (−201) β-Ga2O3 substrate using automated crystal orientation mapping transmission electron microscopy
The microstructure of a (001) κ-Ga 2 O 3 thin film grown on a (−201) β-Ga 2 O 3 substrate by mist CVD was investigated using automated crystal orientation mapping scanning transmission electron microscopy.
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(2025-6-4)
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