The temperature dependence of resistivity in thin metal films

The dependence of resistivity on temperature in thin metal films is investigated by extending the model of Mayadas and Shatzkes to include temperature dependence. It is shown that previous interpretations of a dominant grain boundary mechanism are not necessarily correct, and that the combined influence of grain boundaries and surfaces should be considered in the analysis of experimental results. The analytical expressions developed enable systematic studies of the different factors influencing the dependence of resistivity on temperature in thin metal films.