纳米棒
X射线光电子能谱
拉曼光谱
材料科学
透射电子显微镜
蓝宝石
扫描电子显微镜
分析化学(期刊)
金属有机气相外延
纳米技术
结晶学
外延
化学工程
化学
光学
激光器
图层(电子)
物理
工程类
复合材料
色谱法
作者
C C Chen,R S Chen,Tsung-Ying Tsai,Y. S. Huang,Dah‐Shyang Tsai,K. K. Tiong
标识
DOI:10.1088/0953-8984/16/47/002
摘要
Self-assembled and well aligned RuO2 nanorods (NRs) have been grown on sapphire (SA) substrates via metal–organic chemical vapour deposition (MOCVD), using bis(ethylcyclopentadienyl)ruthenium as the source reagent. The surface morphology, structural, and spectroscopic properties of the as-deposited NRs were characterized using field-emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), selected-area electron diffractometry (SAD), x-ray diffraction (XRD), x-ray photoelectron spectroscopy (XPS), and micro-Raman spectroscopy. FESEM micrographs reveal that vertically aligned nanorods (NRs) were grown on SA(100), while the NRs on the SA(012) were grown with a tilt angle of from the normal to the substrates. TEM and SAD measurements showed that the RuO2 NRs with square cross-section have the long axis directed along the [001] direction. The XRD results indicate that the RuO2 NRs are (002) oriented on SA(100) and (101) oriented on SA(012) substrates. A strong substrate effect on the alignment of the RuO2 NRs growth has been demonstrated and the probable mechanism for the formation of these NRs has been discussed. XP spectra show the coexistence of higher oxidation state of ruthenium in the as-grown RuO2 NRs. Micro-Raman spectra show the red-shift and peak broadening of the RuO2 signatures with respect to that of the bulk counterpart which may be indicative of a phonon confinement effect for these NRs.
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