Performance Improvement of Flexible Pressure Sensor Based on Ordered Hierarchical Structure Array

Abstract Flexible pressure sensors have been extensively explored for their widespread applications in wearable electronic devices such as medical diagnosis and motion monitoring. In this paper, a facile method is adopted to prepare the ordered hierarchical structure array and then it is applied to improve the performance of capacitive flexible pressure sensors. The results indicate that the pressure sensor based on hierarchical structure array is with high sensitivity (0.382 kPa ‐1 ), fast response and recovery time (26 and 25 ms), and its minimum detection pressure can reach 4 Pa. Besides, the sensor based on hierarchical structure array has also been successfully applied to the dynamic pulse monitoring of the neck, limb movement monitoring, and pressure monitoring in water cup grasping process, which shows high stability and reliability, demonstrating its broad application prospects. This research could provide useful guidance for the preparation and applications of high‐performance flexible pressure sensors.