Resonant integrated optical gyroscope with an ultra-high Q value SOI resonant ring

Resonant integrated optical gyroscopes (RIOGs) could integrate multiple devices onto a single chip, further reducing the size and weight of the gyroscope and opening it up to a broader spectrum of applications. This paper conducts in-depth research on resonant optical gyroscopes. A silicon on insulator (SOI) resonator ring with a Q value of 4.65×10 6 was designed based on the Hermite curve. A resonant micro-optical gyroscope (RMOG) was achieved using the resonator ring, traditional phase modulators, and detectors. The results show that the bias instability of the RMOG can reach 0.004°/s, and the gyroscope has the ability to detect angular velocities ranging from −600°/s to +600°/s. Furthermore, a RIOG was demonstrated by designing PIN modulators, detectors and a ring resonator on a single chip, significantly reducing the system floor space to 25 mm 2 , and the bias instability testing is 0.06°/s.