Ultrapure Water in the Electronics Industry

The production of integrated circuits needs an ultra pure water to prepare the acid cleaning and etching baths, to clean the matrices in order to stop the acidic action and to fill the cascade or overflow rinse tanks to remove the last traces of processing solutions. Etch, clean, flush and rinse steps are repeated many times for each matrix until the integrated circuit chip is ready. Impurities in the water can cause failures in the integrated circuit. The objective of this paper is to give an idea about the requirements for the ultra pure water used for the above mentioned applications and to describe an installation designed to meet these requirements.