High-Q resonances in terahertz all-silicon metasurface with imperforated air-hole array

We propose and experimentally demonstrate a high quality (Q)-factor all-silicon bound state in the continuum (BIC) metasurface with an imperforated air-hole array. The metasurface supports two polarization-insensitive BICs originated from guided mode resonances (GMRs) in the frequency range of 0.4 to 0.6 THz, and the measured Q-factors of the two GMRs are as high as 334 and 152, respectively. In addition, the influence of the thickness of the silicon substrate on the two resonances is analyzed in detail. The proposed all-silicon THz metasurface has great potential in the design and application of high-Q metasurfaces.