材料科学
微电子
电介质
化学气相沉积
薄膜
光电子学
工程物理
纳米技术
工程类
作者
Dujiao Zhang,Feihong Wu,Ying Qi,Xinyu Gao,Nan Li,Kejing Wang,Zongyou Yin,Yonghong Cheng,Guodong Meng
摘要
A thickness-tunable, ultra-large, continuous and high-dielectric h-BN films, achieved by optimizing LPCVD growth parameters, exhibit highly promising perspectives to develop electrically reliable 2D microelectronics with an ultrathin feature.
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