INFLUENCE OF PROCESS PARAMETERS ON STRUCTURE OF CARBON COATINGS DEPOSITED AT ATMOSPHERIC PRESSURE

Carbon coatings were deposited on the stainless steel substrates from argon-acetylene gases mixture at atmospheric pressure by arc plasma jet chemical vapor deposition (CVD). It was obtained that the increase of the torch power leads to higher growth rate and increases surface roughness. The growth rates varied in the range of 4−750 nm/s depending on the syntheses conditions. Raman spectra indicated that the bonding structure in the coatings, obtained at 600 W torch powers, changes from the typical diamond-like/graphite-like carbon to the polymer-like carbon with the increase of the distance. The FTIR spectros-copy has shown that the absorption of coatings decreases with the increase of the wave range. The IR spectra showed clear evidence of C = C and C = O sp2 bonds and presence of sp3 CH2 symmetric (2850 cm−1) and asymmetric (2920 cm−1), and sp3 CH3 asymmetric (2960 cm−1) modes in a-C:H coatings. It was obtained that the intensity of the sp2 C = C and C = O modes becomes more intense increasing the distance.