Simple Models for Stacking-Fault Formations in 4H-SiС Epitaxial Layer

Simple models for Shockley-type stacking-fault formations during 4H-SiC epitaxial growth are proposed. The model consists of the accidentally-faulted mis-stacking and the Shockley single-gliding events. At first, the mis-stacking event caused by imperfect step-flow growth is considered. Then the single-gliding event is followed to make more stable stacking sequences. Simple single-gliding is considered rather than complicated double, triple, or quadruple Shockley gliding. All possible mis-stacking and single-gliding events are considered. All of the reported Shockley-type SFs are derived without excess and deficiency from the proposed models.