材料科学
图层(电子)
发光
双层
原子层沉积
光电子学
薄膜
逐层
电介质
沉积(地质)
纳米技术
古生物学
沉积物
生物
作者
Po-Cheng Tsai,Hon-Chin Huang,Chun‐Wei Huang,Shoou‐Jinn Chang,Shih‐Yen Lin
出处
期刊:Nanotechnology
[IOP Publishing]
日期:2020-05-22
卷期号:31 (36): 365702-365702
被引量:4
标识
DOI:10.1088/1361-6528/ab95b5
摘要
With additional precursor soaking, a thin Al2O3 dielectric layer can be grown on mono-layer MoS2 by using atomic layer deposition (ALD). Similar optical characteristics are observed before and after ALD growth for the mono-layer MoS2, which indicates that minor damage to the thin 2D material film is introduced during the growth procedure. With the thin separation layer, luminescence enhancement and dual-color emission are observed by transferring MoS2 and WS2 mono-layer 2D materials to 5 nm Al2O3/mono-layer MoS2 samples, respectively. The results demonstrate that with careful treatment of the interfaces of 2D crystals with other materials, different stacked structures can be established.
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