材料科学
纳米电子学
CMOS芯片
绝缘体(电)
晶体管
半导体
光电子学
MOSFET
六方氮化硼
氮化硼
纳米技术
氮化物
石墨烯
制作
工程物理
电气工程
电压
物理
工程类
作者
Theresia Knobloch,Yu. Yu. Illarionov,Fabian Ducry,Christian Schleich,Stefan Wachter,Kenji Watanabe,Takashi Taniguchi,Thomas Mueller,Michael Waltl,Mario Lanza,M. I. Vexler,Mathieu Luisier,T. Grasser
标识
DOI:10.1038/s41928-020-00529-x
摘要
Complementary metal oxide semiconductor (CMOS) logic circuits at the ultimate scaling limit place the utmost demands on the properties of all materials involved. The requirements for semiconductors are well explored and could possibly be satisfied by a number of layered two-dimensional (2D) materials, like for example transition-metal dichalcogenides or black phosphorus. The requirements for the gate insulator are arguably even more challenging and difficult to meet. In particular the combination of insulator to semiconductor which forms the central element of the metal oxide semiconductor field effect transistor (MOSFET) has to be of superior quality in order to build competitive devices. At the moment, hexagonal boron nitride (hBN) is the most common two-dimensional insulator and widely considered to be the most promising gate insulator in nanoscaled 2D material-based transistors. Here, we critically assess the material parameters of hBN and conclude that while its properties render hBN an ideal candidate for many applications in 2D nanoelectronics, hBN is most likely not suitable as a gate insulator for ultrascaled CMOS devices.
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