A novel two-degrees of freedom (2-DOF) piezo-driven positioning platform with the working stroke being over 20 cm

Multi-degrees of freedom piezo-driven precision positioning platforms with large working strokes are demanded in many research fields. Although many multi-degrees of freedom piezo-driven positioning platforms have been proposed, few of them can achieve both large working stroke and high speed, which hinders their applications. In this study, a two-degrees of freedom piezo-driven positioning platform was proposed by stacking two identical stick-slip piezoelectric actuators. To simplify the practical implementation of a large working stroke, the actuator employed a special structure, in which the compliant mechanism and the slider were connected together as a mover and the guide rail was fixed as a stator. The working stroke of the actuator can be increased easily by increasing only the length of the guide rail without changing the output performances. By designing a lever-type compliant mechanism (LCM) on the side surface of the slider, a large loading space was obtained. Theoretical calculation and finite element analysis of the LCM were performed in detail. As the structures of these two stick-slip piezoelectric actuators are the same, only the output performances of the upper actuator (x direction) were tested as an example. Experimental results indicated that the upper actuator had a stable bi-direction motion with a working stroke being over 20 cm. The maximum speeds along the positive x and negative x directions reached 17.864 and 18.73 mm/s, and the resolutions were 100 and 230 nm, respectively. Furthermore, the vertical loading capacity was larger than 60 N.